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Preparation and testing of SNOM probes
Bobek, Juraj ; Pavera, Michal (referee) ; Spousta, Jiří (advisor)
The area of research that deals with surface modification and preparation of nanostructures is still very unexplored. And only a little contribution to this field is discussed in this bachelor thesis. Its goal is to manufacture and to test a probe made off hollow optical fibre that is used in Scanning Probe Microscopy. Optical fibre parameters in combination with proper and unique techniques allow the breakthrough off very interesting applications. It's worth mentioning the gas injection in the proximity of the surface of a sample (GIS) and thus its modification by use of electrons (FEBID), ions (FIBID) or laser beams.
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Application onf the Focused Ion on Electron Beam in Nanotechnologies
Šamořil, Tomáš ; Mikulík, Petr (referee) ; Jiruše, Jaroslav (referee) ; Šikola, Tomáš (advisor)
Nowadays, the systems that allow simultaneous employment of both focused electron and ion beams are very important tools in the field of micro- and nanotechnology. In addition to imaging and analysis, they can be used for lithography, which is applied for preparation of structures with required shapes and dimensions at the micrometer and nanometer scale. The first part of the thesis deals with one lithographic method – focused electron or ion beam induced deposition, for which a suitable adjustment of exposition parameters is searched and quality of deposited metal structures in terms of shape and elemental composition studied. Subsequently, attention is paid also to other types of lithographic methods (electron or ion beam lithography), which are applied in preparation of etching masks for the subsequent selective wet etching of silicon single crystals. In addition to optimization of mentioned techniques, the application of etched silicon surfaces for, e.g., selective growth of metal structures has been studied. The last part of the thesis is focused on functional properties of selected 2D or 3D structures.
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Self-sensing SPM probes for measuring electrical properties of materials
Očkovič, Adam ; Vařeka, Karel (referee) ; Pavera, Michal (advisor)
The bachelor's thesis is focused on the modification of probes with an integrated sensor usable for measuring conductivity characteristics of surfaces in atomic force microscopy. The first part presents the theory concerning atomic force microscopy, conductivity measurement and deposition using an ion beam. Furthermore, the method of production and limitation of the use of electrically conductive probes with optically read deflection is described. The practical part presents the main problems of probes with integrated sensors in conductivity measurements. Furthermore, the modification of the probes themselves, the measurements made with these probes and suggestions for improving the properties of the probes are described.
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Self-sensing SPM probes for measuring electrical properties of materials
Očkovič, Adam ; Vařeka, Karel (referee) ; Pavera, Michal (advisor)
The bachelor's thesis is focused on the modification of probes with an integrated sensor usable for measuring conductivity characteristics of surfaces in atomic force microscopy. The first part presents the theory concerning atomic force microscopy, conductivity measurement and deposition using an ion beam. Furthermore, the method of production and limitation of the use of electrically conductive probes with optically read deflection is described. The practical part presents the main problems of probes with integrated sensors in conductivity measurements. Furthermore, the modification of the probes themselves, the measurements made with these probes and suggestions for improving the properties of the probes are described.
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Preparation and testing of SNOM probes
Bobek, Juraj ; Pavera, Michal (referee) ; Spousta, Jiří (advisor)
The area of research that deals with surface modification and preparation of nanostructures is still very unexplored. And only a little contribution to this field is discussed in this bachelor thesis. Its goal is to manufacture and to test a probe made off hollow optical fibre that is used in Scanning Probe Microscopy. Optical fibre parameters in combination with proper and unique techniques allow the breakthrough off very interesting applications. It's worth mentioning the gas injection in the proximity of the surface of a sample (GIS) and thus its modification by use of electrons (FEBID), ions (FIBID) or laser beams.
|
|
|
Application onf the Focused Ion on Electron Beam in Nanotechnologies
Šamořil, Tomáš ; Mikulík, Petr (referee) ; Jiruše, Jaroslav (referee) ; Šikola, Tomáš (advisor)
Nowadays, the systems that allow simultaneous employment of both focused electron and ion beams are very important tools in the field of micro- and nanotechnology. In addition to imaging and analysis, they can be used for lithography, which is applied for preparation of structures with required shapes and dimensions at the micrometer and nanometer scale. The first part of the thesis deals with one lithographic method – focused electron or ion beam induced deposition, for which a suitable adjustment of exposition parameters is searched and quality of deposited metal structures in terms of shape and elemental composition studied. Subsequently, attention is paid also to other types of lithographic methods (electron or ion beam lithography), which are applied in preparation of etching masks for the subsequent selective wet etching of silicon single crystals. In addition to optimization of mentioned techniques, the application of etched silicon surfaces for, e.g., selective growth of metal structures has been studied. The last part of the thesis is focused on functional properties of selected 2D or 3D structures.
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